Dr. Jay P. Daniel Profile

Dr. Jay P. Daniel

Director of Engineering

SPIE Involvement:

Author

Publications (16)

Proceedings Article | 11 August 2021 Presentation + Paper

Rate of change of curvature as metric for optical fabrication difficulty in precision aspheres

Jay Daniel, Michael Orr

Proceedings Volume 11816, 118160A (2021) https://doi.org/10.1117/12.2598031

KEYWORDS: Aspheric lenses, Surface finishing, Optical fabrication, Mirrors, Augmented reality, Polishing, Freeform optics, Optical design, Optics manufacturing, Manufacturing

Read Abstract +

Proceedings Article | 22 February 2018 Presentation + Paper

BRDF performance of highly polished Al6061T6 and impact on TMA performance

Katherine Baker, Jay Daniel, Ankit Patel

Proceedings Volume 10528, 1052811 (2018) https://doi.org/10.1117/12.2291531

KEYWORDS: Aluminum, Bidirectional reflectance transmission function, Polishing, Scattering, Surface finishing, Sensors, Visible radiation, Surface roughness

Read Abstract +

Proceedings Article | 18 March 2014 Paper

Development of an EUVL collector with infrared radiation suppression

Bodo Ehlers, Michael Kriese, Yuriy Platonov, Licai Jiang, Jim Rodriguez, Ulrich Mueller, Jay Daniel, Shayna Khatri, Adam Magruder, Steven Grantham, Charles Tarrio, Thomas Lucatorto

Proceedings Volume 9048, 90483C (2014) https://doi.org/10.1117/12.2049279

KEYWORDS: Extreme ultraviolet, Reflectivity, Infrared radiation, Extreme ultraviolet lithography, Plasma, Infrared technology, Neodymium, Nickel, Surface finishing, Diffraction gratings

Read Abstract +

Proceedings Article | 13 September 2012 Paper

JWST: Tinsley achievements on the largest beryllium polishing project

John Barentine, Jay Daniel, Tony Hull

Proceedings Volume 8450, 845021 (2012) https://doi.org/10.1117/12.926715

KEYWORDS: Mirrors, James Webb Space Telescope, Beryllium, Metrology, Safety, Off axis mirrors, Polishing, Aerospace engineering, Cryogenics, Kinematics

Read Abstract +

Proceedings Article | 13 September 2012 Paper

Tinsley proves stress mirror polishing for giant segmented telescopes

Jay Daniel, Ulrich Müller

Proceedings Volume 8450, 845025 (2012) https://doi.org/10.1117/12.926718

KEYWORDS: Polishing, Photovoltaics, Mirrors, Surface finishing, Telescopes, Spherical lenses, Metrology, Manufacturing, Ion beam finishing, Thirty Meter Telescope

Read Abstract +

Proceedings Article | 13 September 2012 Paper

ZERODUR for stressed mirror polishing II: improved modeling of the material behavior

Jay Daniel, Clemens Kunisch, Ulrich Müller, Ralf Jedamzik, Thomas Westerhoff

Proceedings Volume 8450, 84504P (2012) https://doi.org/10.1117/12.924989

KEYWORDS: Mirrors, Data modeling, Polishing, Glasses, Mathematical modeling, Ceramics, Temperature metrology, Time metrology, Zerodur, Actuators

Read Abstract +

Proceedings Article | 5 August 2010 Paper

Tinsley progress on stress mirror polishing (SMP) for the Thirty Meter Telescope (TMT) primary mirror segments II

Tony Hull, Jay Daniel, Tracy Peters, Ulrich Mueller, Stephen Sporer

Proceedings Volume 7733, 773328 (2010) https://doi.org/10.1117/12.857931

KEYWORDS: Mirrors, Telescopes, Space telescopes, Polishing, Photovoltaics, Neodymium, Optical fabrication, Aspheric lenses, Surface finishing, Thirty Meter Telescope

Read Abstract +

Proceedings Article | 5 August 2010 Paper

Successful production of the engineering development unit (EDU) primary mirror segment and flight unit tertiary mirror for JWST

Ankit Patel, Martin Seilonen, Jay Daniel, Ed Boese, Andrew McKay, Benjamin Gallagher, Andrea Arneson, Chris Alongi, Rob Bernier, Adam Magruder, John Kincade, Allen Lee, Gary Surges, Mark Bergeland, Holger Glatzel, Lee Dettmann, Patrick Johnson, Robert Brown, Robert Garfield, Lester Cohen

Proceedings Volume 7731, 77310I (2010) https://doi.org/10.1117/12.858049

KEYWORDS: Mirrors, Phase modulation, James Webb Space Telescope, Metrology, Optical testing, Polishing, Beryllium, Surface finishing, Optical fabrication, Aerospace engineering

Read Abstract +

Proceedings Article | 3 August 2010 Paper

Survey of interferometric techniques used to test JWST optical components

Ron Eng, James Hadaway, Dave Chaney, Ben Gallagher, W. Scott Smith, Lee Dettmann, Rob Bernier, Patrick Johnson, Jay Daniel, Bob Brown, Ankit Patel, Allen Lee, Michael Messerly, Chris Alongi, Martin Seilonen, Adam Magruder, Glen Cole, Doug Leviton, John Schwenker, Andrea Arneson, Pat Reardon, Robert Garfield, H. Philip Stahl, Koby Smith

Proceedings Volume 7790, 779002 (2010) https://doi.org/10.1117/12.862234

KEYWORDS: Mirrors, Interferometers, Metrology, James Webb Space Telescope, Optical testing, Computer generated holography, Optical components, Cryogenics, Interferometry, Optical fabrication

Read Abstract +

Proceedings Article | 19 July 2010 Paper

Narrow ion-beam figuring: a new tool to address extreme slopes on small surfaces located near telescope pupils

Bridget Peters, Olivier Guyon, Jeff Stone, Ruslan Belikov, Jay Daniel, Ulrich Mueller, Thomas Greene

Proceedings Volume 7739, 77390B (2010) https://doi.org/10.1117/12.857962

KEYWORDS: Ion beams, Beam shaping, Telescopes, Spatial frequencies, Ions, Ion beam finishing, Deformable mirrors, Apodization, Imaging systems, Astronomical telescopes

Read Abstract +

Proceedings Article | 24 March 2006 Paper

EUV optical system for the reticle imaging microscope (RIM)

S. Sporer, J. Daniel, H. Glatzel, T. Roff, J. Rosenbohm, U. Mueller, K. Khajehnouri

Proceedings Volume 6151, 615130 (2006) https://doi.org/10.1117/12.677199

KEYWORDS: Mirrors, Extreme ultraviolet, Imaging systems, Microscopes, Surface finishing, Atomic force microscopy, Reticles, Optical coatings, Wavefronts, Polishing

Read Abstract +

Proceedings Article | 6 May 2005 Paper

Characterization of prototype optical surfaces and coatings for the EUV reticle imaging microscope

J. Rodriguez, T. Roff, S. Wong, S. Sporer, H. Glatzel, M. Kriese, J. Daniel, K. Khajehnouri, Y. Platonov

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.619290

KEYWORDS: Optical coatings, Reflectivity, Photovoltaics, Extreme ultraviolet, Microscopes, Reticles, Light scattering, Mirrors, Atomic force microscopy, Prototyping

Read Abstract +

Proceedings Article | 11 March 2002 Paper

100-nm OPC mask patterning using raster-scan 50-kV pattern generation technology

Frank Abboud, David Trost, Robert Dean, William DeVore, Mark Gesley, Damon Cole, Robert Naber, Frederick Raymond, Varoujan Chakarian, Ki-Ho Baik, Jay Daniel, Mark Wiltse, Thomas Newman

Proceedings Volume 4562, (2002) https://doi.org/10.1117/12.491928

KEYWORDS: Photomasks, Optical proximity correction, Raster graphics, Optical lithography, Electron beam lithography, Edge roughness, Lithography, Model-based design, Point spread functions, Photoresist processing

Read Abstract +

Proceedings Article | 9 April 2001 Paper

Improved throughput in the ALTA 3000 IC mask writing system

Vishal Garg, Gregory Valentin, Jay Daniel, Daniel Sprenkel, Henry Chris Hamaker

Proceedings Volume 4349, (2001) https://doi.org/10.1117/12.425085

KEYWORDS: Photomasks, Printing, Mirrors, Reticles, Composites, Calibration, Semiconductors, Laser systems engineering, Bragg cells, Modulation

Read Abstract +

Proceedings Article | 22 January 2001 Paper

Improved throughput in 0.6-NA laser reticle writers

Henry Chris Hamaker, Gregory Valentin, Daniel Sprenkel, Jay Daniel, Vishal Garg

Proceedings Volume 4186, (2001) https://doi.org/10.1117/12.410724

KEYWORDS: Printing, Composites, Reticles, Photomasks, Semiconductors, Critical dimension metrology, Bragg cells, Modulation, Edge roughness, Laser development

Read Abstract +

Proceedings Article | 23 November 1999 Paper

Progress in the development of three-aspherical mirror optics for EUVL

Jay Daniel, Takeo Watanabe, Michael Kriese, Hiroo Kinoshita, Daniel Bajuk, Yuriy Platonov, Yachiyo Kimpara

Proceedings Volume 3767, (1999) https://doi.org/10.1117/12.371114

KEYWORDS: Mirrors, Extreme ultraviolet lithography, Multilayers, Reflectivity, Coating, Surface finishing, Polishing, Phase interferometry, Interferometers, Semiconducting wafers

Read Abstract +

Showing 5 of 16 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years