Dr. Jay Huang
Optical System Engineer at KLA-Tencor Corp
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | November 21, 2007
Proc. SPIE. 6827, Quantum Optics, Optical Data Storage, and Advanced Microlithography
KEYWORDS: Wafer-level optics, Thin films, Refractive index, Beam splitters, Metrology, Optical lithography, Interferometers, Linear filtering, Critical dimension metrology, Semiconducting wafers

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