Jean-Baptiste Henry
at CEA-LETI
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 March 2019
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Edge detection, Data modeling, Calibration, Polymers, 3D modeling, Atomic force microscopy, Photoresist materials, Microlens, Computer aided design, Photoresist processing

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