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Jean-Christophe Coiffic
at Commissariat a l'Energie Atomique
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Publications (1)
Proceedings Article | 4 September 2008 Paper
An application of carbon nanotubes for integrated circuit interconnects
J. C. Coiffic, L. Foa Torres, H. Le Poche, M. Fayolle, S. Roche, S. Maitrejean, S. Roualdes, A. Ayral
Proceedings Volume 7037, 70370D (2008) https://doi.org/10.1117/12.799100
KEYWORDS: Carbon nanotubes, Copper, Semiconducting wafers, Integrated circuits, Chemical vapor deposition, Plasma enhanced chemical vapor deposition, Resistance, Nickel, Carbon, Transistors
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