Dr. Jean-Christophe Marusic
at Soitec SA
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | October 29, 2014
Proc. SPIE. 9235, Photomask Technology 2014
KEYWORDS: Lithography, Electron beam lithography, Manufacturing, Photonic crystals, Printing, Data processing, Photomasks, Photoresist processing, Tolerancing, Vestigial sideband modulation

PROCEEDINGS ARTICLE | October 8, 2014
Proc. SPIE. 9235, Photomask Technology 2014
KEYWORDS: Wafer-level optics, Carbon, Lithography, Electron beam lithography, Contamination, Chemical species, Scanning electron microscopy, Chemical analysis, Semiconducting wafers, Chemically amplified resists

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Carbon, Lithography, Contamination, Chemical species, Polymers, Silicon, Scanning electron microscopy, Projection systems, Thin film coatings, Semiconducting wafers

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