Dr. Jean-Christophe Marusic Profile

Dr. Jean-Christophe Marusic

at Soitec

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 29 October 2014 Paper

Photonic curvilinear data processing

Clyde Browning, Thomas Quaglio, Thiago Figueiro, Sébastien Pauliac, Jérôme Belledent, Aurélien Fay, Jessy Bustos, Jean-Christophe Marusic, Patrick Schiavone

Proceedings Volume 9235, 92350V (2014) https://doi.org/10.1117/12.2069335

KEYWORDS: Tolerancing, Lithography, Manufacturing, Vestigial sideband modulation, Photomasks, Data processing, Photoresist processing, Electron beam lithography, Printing, Photonic crystals

Read Abstract +

Proceedings Article | 8 October 2014 Paper

Assessment of carbon layer growth induced by resists outgassing in multi e-beams lithography

JC Marusic, ML Pourteau, S. Cêtre, L. Pain, AP Mebiene-Engohang, S. David, S. Labau, J. Boussey

Proceedings Volume 9235, 923520 (2014) https://doi.org/10.1117/12.2066152

KEYWORDS: Contamination, Semiconducting wafers, Carbon, Electron beam lithography, Scanning electron microscopy, Lithography, Wafer-level optics, Chemical species, Chemical analysis, Chemically amplified resists

Read Abstract +

Proceedings Article | 28 March 2014 Paper

Investigation of the resist outgassing and hydrocarbonaceous contamination induced in multi-electron-beam lithography tools

A.-P. Mebiene-Engohang, M. Pourteau, J. Marusic, L. Pain, T. Nakayama, A. Miyake, M. Smits, S. David, S. Labau, J. Boussey

Proceedings Volume 9049, 90492Q (2014) https://doi.org/10.1117/12.2046350

KEYWORDS: Contamination, Semiconducting wafers, Silicon, Thin film coatings, Scanning electron microscopy, Polymers, Carbon, Projection systems, Chemical species, Lithography

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years