Dr. Jean Gabriel Simiz
RET / OPC Engineer at STMicroelectronics
SPIE Involvement:
Publications (6)

Proceedings Article | 28 April 2023 Poster + Paper
Proceedings Volume 12494, 1249412 (2023) https://doi.org/10.1117/12.2657686
KEYWORDS: Scanners, Light sources and illumination, Semiconducting wafers, Contour extraction, Image filtering, Lithography, Automation, Scanning electron microscopy

Proceedings Article | 28 March 2017 Paper
Proceedings Volume 10145, 101450X (2017) https://doi.org/10.1117/12.2260024
KEYWORDS: Semiconducting wafers, Metrology, Optical lithography, Electron beam lithography, Scanners, Finite element methods, Scanning electron microscopy, Lithography, Inspection, Computational lithography

Proceedings Article | 16 March 2016 Paper
Proceedings Volume 9781, 97810S (2016) https://doi.org/10.1117/12.2219143
KEYWORDS: Scanners, Design for manufacturability, Manufacturing, Product engineering, Reticles, Visualization, Image resolution, Chemical mechanical planarization, Sensors, Time metrology, Data modeling, Semiconducting wafers, Optical lithography, Performance modeling, Photomasks

Proceedings Article | 8 March 2016 Paper
Proceedings Volume 9778, 97782O (2016) https://doi.org/10.1117/12.2220295
KEYWORDS: Semiconducting wafers, Process control, Metals, Photomasks, Data processing, Defect detection, 3D modeling, Image processing, Lithography, Computational lithography, Scanners, Finite element methods, Optical lithography, Etching, Metrology, Scanning electron microscopy

Proceedings Article | 4 September 2015 Paper
Proceedings Volume 9661, 96610R (2015) https://doi.org/10.1117/12.2194079
KEYWORDS: Scanners, Semiconducting wafers, Polonium, Logic, Sensors, Printing, Photomasks, Electroluminescent displays, Product engineering, Optical lithography

Showing 5 of 6 publications
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