Dr. Jean-Hervé Tortai
at LTM CNRS
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Electron beams, Image processing, Silicon, Diffusion, Scanning electron microscopy, Signal processing, Finite element methods

Proceedings Article | 19 September 2018
Proc. SPIE. 10775, 34th European Mask and Lithography Conference
KEYWORDS: Electron beam lithography, Metrology, Silicon, Diffusion, 3D modeling, Scanning electron microscopy, Monte Carlo methods, Finite element methods

Proceedings Article | 26 September 2016
Proc. SPIE. 9985, Photomask Technology 2016
KEYWORDS: Lithography, Electron beam lithography, Point spread functions, Switches, Data modeling, Calibration, Electroluminescence, Chemical analysis, Optimization (mathematics), Statistical modeling

Proceedings Article | 1 October 2013
Proc. SPIE. 8886, 29th European Mask and Lithography Conference
KEYWORDS: Mathematical modeling, Electron beam lithography, Point spread functions, Reticles, Metrology, Modulation, Calibration, Forward error correction, Semiconducting wafers, Chemical mechanical planarization

Proceedings Article | 23 September 2013
Proc. SPIE. 8880, Photomask Technology 2013
KEYWORDS: Electron beam lithography, Point spread functions, Metrology, Data modeling, Opacity, Calibration, Error analysis, Semiconducting wafers, Statistical modeling, Process modeling

Proceedings Article | 8 November 2012
Proc. SPIE. 8522, Photomask Technology 2012
KEYWORDS: Electron beam lithography, Point spread functions, Electron beams, Metrology, Data modeling, Calibration, Optimization (mathematics), Photoresist processing, Semiconducting wafers, Beam analyzers

Showing 5 of 11 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top