Dr. Jean Louis Leclercq
Senior Researcher CNRS at Ecole Centrale de Lyon
SPIE Involvement:
Publications (36)

Proceedings Article | 1 May 2023 Presentation + Paper
Proceedings Volume 12498, 1249818 (2023) https://doi.org/10.1117/12.2658423
KEYWORDS: Semiconducting wafers, Silicon, Deep ultraviolet, Lithography, Photoacid generators, Photoresist processing, Plasma etching, Etching, Optical lithography, Film thickness, Sustainability

Proceedings Article | 20 March 2018 Presentation + Paper
Mathieu Caillau, Céline Chevalier, Pierre Crémillieu, Thierry Delair, Olivier Soppera, Benjamin Leuschel, Cédric Ray, Christophe Moulin, Christian Jonin, Emmanuel Benichou, Pierre-François Brevet, Christelle Yeromonahos, Emmanuelle Laurenceau, Yann Chevolot, Jean-Louis Leclercq
Proceedings Volume 10587, 105870S (2018) https://doi.org/10.1117/12.2292312
KEYWORDS: Biopolymers, Electron beam lithography, Lithography, Optical lithography, Silicon, Silica, Etching, Absorbance, Polymers, Ultraviolet radiation, Polymethylmethacrylate

Proceedings Article | 28 April 2017 Presentation
Proceedings Volume 10113, 1011303 (2017) https://doi.org/10.1117/12.2255617
KEYWORDS: Dielectrics, Photonic crystals, Thin films, Reflection, Plasmonics, Dielectric polarization, Energy efficiency, Dispersion, Nanotechnology, Current controlled current source

Proceedings Article | 26 July 2016 Presentation
Proceedings Volume 9885, 98850P (2016) https://doi.org/10.1117/12.2227526
KEYWORDS: Photonic crystals, Optical components, Waveguides, Reflection, Photonic devices, Control systems, Photons, Mirrors, Optical microcavities, Dielectric polarization, Vertical cavity surface emitting lasers

Proceedings Article | 15 March 2016 Paper
Proceedings Volume 9757, 975703 (2016) https://doi.org/10.1117/12.2208654
KEYWORDS: Dispersion, Crystals, Nonlinear crystals, Silicon, Charged particle optics, Solar cells, Photons, Reflectors, Reflectivity, Vertical cavity surface emitting lasers

Showing 5 of 36 publications
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