Dr. Jean-Paul Allain
at Purdue Univ
SPIE Involvement:
Author
Publications (7)

PROCEEDINGS ARTICLE | May 19, 2011
Proc. SPIE. 8077, Damage to VUV, EUV, and X-ray Optics III
KEYWORDS: Mirrors, Particles, Reflectivity, Atomic force microscopy, Xenon, Extreme ultraviolet, Rhodium, Ruthenium, EUV optics, Tin

PROCEEDINGS ARTICLE | May 18, 2007
Proc. SPIE. 6586, Damage to VUV, EUV, and X-ray Optics
KEYWORDS: Mirrors, Particles, Ions, Reflectivity, Surface roughness, Xenon, Extreme ultraviolet, Extreme ultraviolet lithography, Ruthenium, Tin

PROCEEDINGS ARTICLE | March 15, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Mirrors, Chemical species, Particles, Ions, Reflectivity, Extreme ultraviolet, Palladium, Extreme ultraviolet lithography, Ruthenium, Tin

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Mirrors, Argon, Sputter deposition, Crystals, Ions, Reflectivity, Extreme ultraviolet, Ruthenium, Plasma, Tin

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Mirrors, Scattering, Argon, Particles, Ions, Reflectivity, Xenon, Extreme ultraviolet, Ruthenium, Tin

PROCEEDINGS ARTICLE | May 20, 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Sputter deposition, Electrodes, Particles, Copper, Ions, Xenon, Extreme ultraviolet, Extreme ultraviolet lithography, Ruthenium, Plasma

Showing 5 of 7 publications
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