Dr. Jean-Paul Allain
at Purdue Univ
SPIE Involvement:
Publications (7)

Proceedings Article | 19 May 2011 Paper
J. Allain, B. Holybee, M. List, A. Kacic, M. Nieto-Perez, M. Hendricks
Proceedings Volume 8077, 80770I (2011) https://doi.org/10.1117/12.888369
KEYWORDS: Ruthenium, Tin, Rhodium, Reflectivity, Mirrors, Extreme ultraviolet, Particles, Atomic force microscopy, Xenon, EUV optics

Proceedings Article | 18 May 2007 Paper
J. P. Allain, M. Nieto, M. Hendricks, S. S. Harilal, A. Hassanein
Proceedings Volume 6586, 65860W (2007) https://doi.org/10.1117/12.723692
KEYWORDS: Mirrors, Tin, Reflectivity, Ions, Ruthenium, Xenon, Particles, Extreme ultraviolet, Extreme ultraviolet lithography, Surface roughness

Proceedings Article | 15 March 2007 Paper
J. Allain, M. Nieto, M. Hendricks, A. Hassanein, C. Tarrio, S. Grantham, V. Bakshi
Proceedings Volume 6517, 65171V (2007) https://doi.org/10.1117/12.711270
KEYWORDS: Tin, Mirrors, Extreme ultraviolet, Reflectivity, Palladium, Extreme ultraviolet lithography, Ions, Ruthenium, Particles, Chemical species

Proceedings Article | 24 March 2006 Paper
J. Allain, M. Nieto, A. Hassanein, V. Titov, P. Plotkin, M. Hendricks, E. Hinson, C. Chrobak, M. van der Velden, B. Rice
Proceedings Volume 6151, 615131 (2006) https://doi.org/10.1117/12.656652
KEYWORDS: Tin, Ions, Mirrors, Reflectivity, Extreme ultraviolet, Argon, Ruthenium, Crystals, Sputter deposition, Plasma

Proceedings Article | 6 May 2005 Paper
Jean Allain, Ahmed Hassanein, Martin Nieto, Vladimir Titov, Perry Plotkin, Edward Hinson, Bryan Rice, Robert Bristol, Daniel Rokusek, Wayne Lytle, Brent Heuser, Monica Allain, Hyunsu Ju, Christopher Chrobak
Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.598515
KEYWORDS: Tin, Ions, Extreme ultraviolet, Ruthenium, Mirrors, Particles, Scattering, Argon, Xenon, Reflectivity

Showing 5 of 7 publications
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