Jean-Paul E. Sier
Applications Engineer at KLA Corp
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 14 October 2011 Paper
Proc. SPIE. 8166, Photomask Technology 2011
KEYWORDS: Inspection, Data conversion, Data processing, Databases, Manufacturing, Explosives, Neodymium, Polonium, Photomask technology, Current controlled current source

Proceedings Article | 2 May 2008 Paper
Proc. SPIE. 6792, 24th European Mask and Lithography Conference
KEYWORDS: Inspection, Reticles, Databases, Defect detection, SRAF, 3D modeling, Data modeling, Image transmission, Logic, Optical proximity correction

Proceedings Article | 16 November 2007 Paper
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Inspection, Contamination, Photomasks, Defect detection, Databases, Defect inspection, Stereolithography, Modulation, Environmental sensing, Quartz

Proceedings Article | 25 October 2007 Paper
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Inspection, Reticles, Databases, Defect detection, SRAF, 3D modeling, Data modeling, Logic, Image transmission, Optical proximity correction

Proceedings Article | 15 May 2007 Paper
Proc. SPIE. 6607, Photomask and Next-Generation Lithography Mask Technology XIV
KEYWORDS: Inspection, Defect detection, Contamination, Reticles, Photomasks, Defect inspection, Detection and tracking algorithms, Stars, Dysprosium, Optical properties

Showing 5 of 8 publications
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