Dr. Jeanette M. Roberts
Staff Engineer at Intel Corp
SPIE Involvement:
Publications (30)

Proceedings Article | 31 March 2010 Paper
Proceedings Volume 7639, 76391Y (2010) https://doi.org/10.1117/12.846990
KEYWORDS: Optical lithography, Floods, Lithography, Image processing, Systems modeling, Photoresist processing, MATLAB, Optical engineering, Diffraction, Semiconducting wafers

Proceedings Article | 26 March 2010 Paper
Proceedings Volume 7639, 763905 (2010) https://doi.org/10.1117/12.846988
KEYWORDS: Semiconducting wafers, Polymers, Photons, Lithography, Floods, 193nm lithography, Optical lithography, Photoresist materials, Scanners, Photomasks

Proceedings Article | 1 April 2009 Paper
Proceedings Volume 7273, 72731W (2009) https://doi.org/10.1117/12.814342
KEYWORDS: Extreme ultraviolet, Absorbance, Reflectivity, Semiconducting wafers, Polymers, Extreme ultraviolet lithography, Mirrors, Lithography, Silicon, Titanium dioxide

Proceedings Article | 1 April 2009 Paper
Theodore Fedynyshyn, David Astolfi, Alberto Cabral, Susan Cann, Indira Pottebaum, Jeanette Roberts
Proceedings Volume 7273, 727349 (2009) https://doi.org/10.1117/12.814811
KEYWORDS: Polymers, Surface roughness, Polymer thin films, Profiling, Line edge roughness, Photoresist processing, Diffusion, Atomic force microscopy, Line width roughness, Lithography

Proceedings Article | 15 April 2008 Paper
Proceedings Volume 6923, 69232F (2008) https://doi.org/10.1117/12.782634
KEYWORDS: Polymers, Polymer thin films, Ionization, Picosecond phenomena, Deep ultraviolet, Absorption, Photoresist materials, Molecules, Matrices, Photolysis

Showing 5 of 30 publications
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