Dr. Jeff Chinn Profile

Dr. Jeff Chinn

President and Chief Executive Officer at Applied MicroStructures Inc

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Publications (3)

Proceedings Article | 23 March 2006 Paper

Vapor deposited release layers for nanoimprint lithography

Tong Zhang, Boris Kobrin, Mike Wanebo, Romek Nowak, Richard Yi, Jeff Chinn, Markus Bender, Andreas Fuchs, Martin Otto

Proceedings Volume 6151, 615117 (2006) https://doi.org/10.1117/12.654658

KEYWORDS: Nanoimprint lithography, Liquids, Lithography, Coating, Deposition processes, Silicon, Self-assembled monolayers, Photoresist processing, Process control, Plasma

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Proceedings Article | 22 January 2005 Paper

Molecular vapor deposition (MVD) for improved SAM coatings

Boris Kobrin, Jeff Chinn, Robert Ashurst, Roya Maboudian

Proceedings Volume 5716, (2005) https://doi.org/10.1117/12.592627

KEYWORDS: Self-assembled monolayers, Silicon, Glasses, Liquids, Microelectromechanical systems, Reliability, Optical coatings, Plastic coatings, Polymers, Manufacturing

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Proceedings Article | 30 December 2003 Paper

Improved vapor-phase deposition technique for antistiction monolayers

Robert Ashurst, Carlo Carraro, Jeff Chinn, Victor Fuentes, Boris Kobrin, Roya Maboudian, Romuald Nowak, Richard Yi

Proceedings Volume 5342, (2003) https://doi.org/10.1117/12.531798

KEYWORDS: Coating, Microelectromechanical systems, Deposition processes, Semiconducting wafers, Plasma treatment, Plasma, Liquids, Self-assembled monolayers, Process control, Reliability

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