Dr. Jeff A. McMurran
Inspection Section Coordinator at Photronics Inc
SPIE Involvement:
Publications (8)

Proceedings Article | 20 October 2016 Paper
Proceedings Volume 10032, 1003205 (2016) https://doi.org/10.1117/12.2247941
KEYWORDS: Photomasks, Manufacturing, Optical proximity correction, SRAF, Inspection, Metals, Optics manufacturing, Scanning electron microscopy, Logic, Lithography

Proceedings Article | 5 October 2016 Paper
Yohan Choi, Michael Green, Jeff McMurran, Young Ham, Howard Lin, Andy Lan, Richer Yang, Mike Lung
Proceedings Volume 9985, 998521 (2016) https://doi.org/10.1117/12.2248678
KEYWORDS: Photomasks, Semiconducting wafers, Critical dimension metrology, 3D modeling, Optical proximity correction, Manufacturing, Metrology, Finite element methods, Mask making, Lithography

Proceedings Article | 26 September 2016 Paper
Proceedings Volume 9985, 99850R (2016) https://doi.org/10.1117/12.2243407
KEYWORDS: Photomasks, SRAF, Optical proximity correction, Logic, Manufacturing, Metals, Inspection, Image processing, Information operations, Scanning electron microscopy

Proceedings Article | 23 October 2015 Paper
William Chou, James Cheng, Alex Tseng, J. Wu, Chin Kuei Chang, Jeffrey Cheng, Adder Lee, Chain Ting Huang, N. Peng, Simon C. Hsu, Chun Chi Yu, Colbert Lu, Julia Yu, Peter Craig, Chuck Pollock, Young Ham, Jeff McMurran
Proceedings Volume 9635, 96351R (2015) https://doi.org/10.1117/12.2196794
KEYWORDS: Photomasks, Semiconducting wafers, Overlay metrology, Image registration, Double patterning technology, Lithography, Source mask optimization, Reticles, Pellicles, 193nm lithography

Proceedings Article | 30 September 2009 Paper
Mark Wylie, Trent Hutchinson, Gang Pan, Thomas Vavul, John Miller, Aditya Dayal, Carl Hess, Mike Green, Shad Hedges, Dan Chalom, Maciej Rudzinski, Craig Wood, Jeff McMurran
Proceedings Volume 7488, 74881O (2009) https://doi.org/10.1117/12.830148
KEYWORDS: Photomasks, Reticles, Scanning electron microscopy, Critical dimension metrology, Inspection, Manufacturing, Etching, Error analysis, Semiconducting wafers, Binary data

Showing 5 of 8 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top