Mr. Jeff Michelmann Profile

Jeff Michelmann

at Heidelberg Instruments Mikrotechnik GmbH

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 9 April 2024 Presentation + Paper

Matthias Wahl, Jeff Michelmann, Holger Sailer, Angela Schneider, Nicolas Dionisio

Proceedings Volume 12956, 129560A (2024) https://doi.org/10.1117/12.3010803

KEYWORDS: Direct write lithography, Equipment, Lithography, Advanced patterning, Image quality, Semiconducting wafers

Proceedings Article | 16 September 2022 Paper

Markus Greul, Holger Sailer, Matthias Wahl, John Duff, Jeff Michelmann, Richard Bojko, Dmitri Titko, Konrad Rössler, Nezih Ünal

Proceedings Volume 12325, 123250P (2022) https://doi.org/10.1117/12.2640799

KEYWORDS: Photomasks, Photonic devices, Manufacturing, Calibration, Line edge roughness, Lithography, Waveguides, Photonics

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