Mr. Jeffery Kao-Tun Chen Profile

Jeffery Kao-Tun Chen

Engineer at Winbond Electronics Corp

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Publications (2)

Proceedings Article | 20 March 2018 Paper

A portable pattern-based design technology co-optimization flow to reduce optical proximity correction run-time

Yi-Chieh Chen, Tsung-Han Li, Hung-Yu Lin, Kao-Tun Chen, Chun-Sheng Wu, Ya-Chieh Lai, Philippe Hurat

Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII

KEYWORDS: Mathematical modeling, Electronics, Integrated optics, Integrated circuits, Semiconductor manufacturing, Optical proximity correction, Integrated circuit design, Optics manufacturing, Design for manufacturability

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Proceedings Article | 4 March 2010 Paper

The impact of resist model on mask 3D simulation accuracy beyond 40nm node memory patterns

Kao-Tun Chen, Shin-Shing Yeh, Ya-Hsuan Hsieh, Jun-Cheng Lai, Stewart Robertson, John Biafore, Sanjay Kapasi, Arthur Lin

Proc. SPIE. 7640, Optical Microlithography XXIII

KEYWORDS: Seaborgium, Data modeling, Calibration, 3D modeling, Photomasks, Optical simulations, Semiconducting wafers, Performance modeling, 3D image processing, Instrument modeling

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