Dr. Jeffery Langer
at Finnegan Henderson Farabow Garrett & Dunner LLP
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 31 May 2005
Proc. SPIE. 5783, Infrared Technology and Applications XXXI
KEYWORDS: Photodetectors, Etching, Argon, Dry etching, Gallium antimonide, Diodes, Wet etching, Plasma etching, Chlorine, Plasma

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