Dr. Jeffery T. Wetzel
at SVTC Technologies LLC
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | March 26, 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Lithography, Optical lithography, Etching, Quartz, Metals, Ultraviolet radiation, Manufacturing, Chromium, Photomasks, Nanoimprint lithography

PROCEEDINGS ARTICLE | March 20, 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Lithography, Optical lithography, Etching, Metals, Dielectrics, Chemistry, Resistance, Critical dimension metrology, Reactive ion etching, Back end of line

PROCEEDINGS ARTICLE | March 23, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Lithography, Optical lithography, Polymers, Copper, Dielectrics, Silicon, Polymerization, Sol-gels, Liquids, Chemical mechanical planarization

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Lithography, Optical lithography, Etching, Metals, Copper, Dielectrics, Silicon, Plasma etching, Nanoimprint lithography, Semiconducting wafers

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