Jeffrey A. Albelo
CEO at Quantum Group Consulting Ltd
SPIE Involvement:
Publications (8)

Proceedings Article | 14 February 2008 Paper
Jeffrey Albelo, Peter Pirogovsky, James O'Brien, Brian Baird
Proceedings Volume 6871, 687122 (2008)
KEYWORDS: Picosecond phenomena, Micromachining, Laser processing, Logic devices, Semiconductors, Metals, Semiconducting wafers, Photomicroscopy, Pulsed laser operation, Laser applications

Proceedings Article | 5 September 2001 Paper
Proceedings Volume 4409, (2001)
KEYWORDS: Photomasks, Photoresist processing, Critical dimension metrology, Lithography, Photoresist materials, Deep ultraviolet, Diffusion, Manufacturing, Coating, Process control

Proceedings Article | 24 August 2001 Paper
Proceedings Volume 4345, (2001)
KEYWORDS: Etching, Photomasks, Photoresist processing, Deep ultraviolet, Critical dimension metrology, Manufacturing, Coating, Lithography, Semiconducting wafers, Chemistry

Proceedings Article | 24 August 2001 Paper
Benjamen Rathsack, Peter Tattersall, Cyrus Tabery, Kathleen Lou, Timothy Stachowiak, David Medeiros, Jeff Albelo, Peter Pirogovsky, Dennis McKean, C. Grant Willson
Proceedings Volume 4345, (2001)
KEYWORDS: Picture Archiving and Communication System, Deep ultraviolet, Chromophores, Photoresist processing, Lithography, Absorbance, Molecules, Mask making, Photomasks, Hydrogen

Proceedings Article | 22 January 2001 Paper
Proceedings Volume 4186, (2001)
KEYWORDS: Photomasks, Chromium, Reflectivity, Oxides, Absorption, Refraction, Chemically amplified resists, Lithography, Photoresist processing, Mask making

Showing 5 of 8 publications
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