Jeffrey S. Hodges
at Texas Instruments Inc
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | June 2, 2003
Proc. SPIE. 5038, Metrology, Inspection, and Process Control for Microlithography XVII
KEYWORDS: Semiconductors, Oxides, Metrology, Etching, Control systems, Process control, Spectroscopic ellipsometry, Transistors, Critical dimension metrology, Semiconducting wafers

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