Jeffrey A. Reed
at Univ of Texas at Dallas
SPIE Involvement:
Author
Publications (1)

SPIE Journal Paper | 1 January 2002
OE Vol. 41 Issue 01
KEYWORDS: Reflectivity, Polarization, Diffraction, Optical design, Optical engineering, Structural design, Lithography, Computer simulations, Semiconducting wafers, Diffraction gratings

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