Dr. Jelena Sepa Profile

Dr. Jelena Sepa

Technology Roadmap Manager at EMD Electronics

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Publications (1)

Proceedings Article | 11 September 2007 Paper

Dielectric constant trends in silicate spin-on glasses

Nancy Iwamoto, Tao Li, Jelena Sepa, Ahila Krishnamoorthy

Proceedings Volume 6645, 66452A (2007) https://doi.org/10.1117/12.736492

KEYWORDS: Dielectrics, Silicon, Silicates, Thin films, Quartz, Glasses, Microelectronics, Data modeling, Microelectromechanical systems, FT-IR spectroscopy

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