Dr. Jelena Sepa
Director, Partnerships & Scouting at EMD Performance Materials
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | September 11, 2007
Proc. SPIE. 6645, Nanoengineering: Fabrication, Properties, Optics, and Devices IV
KEYWORDS: Microelectromechanical systems, Thin films, FT-IR spectroscopy, Data modeling, Quartz, Glasses, Dielectrics, Silicon, Microelectronics, Silicates

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