Jennifer S. Hartley
at Swinburne Univ of Technology
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 7, 2013
Proc. SPIE. 8923, Micro/Nano Materials, Devices, and Systems
KEYWORDS: Gold, Etching, Dry etching, Molecules, Silicon, Coating, Oxygen, Scanning electron microscopy, Aluminum, Reactive ion etching

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