Ms. Jennifer S. Hartley Profile

Jennifer S. Hartley

at Swinburne Univ of Technology

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 7 December 2013 Paper

G. Gervinskas, P. Michaux, G. Seniutinas, J. Hartley, E. Mayes, R. Verma, B. Gupta, P. Stoddart, D. Morrish, N. Fahim, M. S. Hossain, S. Juodkazis

Proceedings Volume 8923, 892305 (2013) https://doi.org/10.1117/12.2033707

KEYWORDS: Gold, Molecules, Silicon, Reactive ion etching, Coating, Oxygen, Scanning electron microscopy, Dry etching, Etching, Aluminum

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Keywords/Phrases