Jennifer E. Kopp
at KLA-Tencor Corp
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | December 14, 2009
Proc. SPIE. 7520, Lithography Asia 2009
KEYWORDS: Lithography, Defect detection, Phase modulation, Imaging systems, Scanners, Inspection, Immersion lithography, Critical dimension metrology, Semiconducting wafers, Defect inspection

PROCEEDINGS ARTICLE | March 24, 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Lithography, Reticles, Logic, Modulation, Inspection, Wafer inspection, Semiconducting wafers, Product engineering, 193nm lithography, Defect inspection

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