Prof. Jenq-Shyong Chen Profile

Prof. Jenq-Shyong Chen

at National Chung Cheng Univ

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Publications (2)

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Proceedings Article | 16 November 2011 Paper

Polarized multi-color in-line digital holographic microscope for high-speed 3D surface profiling

Jenq-Shyong Chen, Zi Sheng Lin

Proceedings Volume 8321, 832140 (2011) https://doi.org/10.1117/12.905847

KEYWORDS: Digital holography, 3D metrology, Holography, Microscopes, Phase measurement, Holograms, CCD image sensors, Spatial resolution, Light emitting diodes, Turbulence

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A multi-color in-line digital holographic microscope (DHM) has been developed for high speed profile measurement of micro-structures. The in-line architecture of the proposed DHM offers a high spatial resolution compared with the conventional off-axis DHM. The multi-color DHM captures the three color hologram simultaneously in one-shot recording by using a color CCD sensor and three RGB LED sources. The measurement range without phase ambiguity of the multi-color DHM is extended up to 5 micrometers compared with the 0.3 micrometer of the conventional single wavelength DHM technology. The real-time reconstruction rate of 3D profile is estimated around 20fps when using a 100 frame/sec CCD camera and a simple three-step phase shifting algorithm. The high reconstruction rate is important for the measurement in the shop floor where fast measurement and immunity to the environment disturbance are demanded. The air turbulence and floor vibration effects are further reduced by the near common-path architecture of the proposed DHM. A phase stability of better than 5nm is achieved without any need of anti-vibration instrument table and air turbulence protection cover.

Proceedings Article | 12 January 2009 Paper

Full-field mapping of the stress-induced birefringence using a polarized low coherence interference microscope

Jenq-Shyong Chen, Yung-Kuo Huang

Proceedings Volume 7133, 71333I (2009) https://doi.org/10.1117/12.821246

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A polarization-sensitive optical coherence microscope (PS-OCM) has been developed to non-destructively measure birefringence distribution at the surface and internal interfaces of multi-layer structures. The PS-OCM can make twodimensional en face measurement by exploiting the parallel sensing capability of the CCD sensors. PS-OCM utilizes the low coherence interference principle to enable the depth-resolved mapping of the birefringence distribution inside the materials. By simultaneous detection of interference fringes in two orthogonal polarization states allows determination of the Strokes parameters of light. Comparison of the Strokes parameters of the incident state to that reflected light from the sample can yield a depth-resolved map of optical properties such as birefringence and refractive index. Because many semiconductor and optic materials such as ceramic/wafer/polymer/glass are stress-induced birefringence materials, changes in birefringence distribution may, for instance, indicate changes in material uniformity and stress inside the materials. The PS-OCM has the capability to measure the spatial stress-field distribution of a material caused by the residual stress or applied load. Using the high numerical aperture of the objective lens and the broad bandwidth of the light source, the PS-OCM has the 1.5micrometer and 1.6 micrometer resolutions respectively in the lateral direction and longitudinal (or depth) direction.

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