Jens Wustenfeld
at ASML Netherlands B.V.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 28 April 2023 Paper
Proceedings Volume 12494, 124940Y (2023) https://doi.org/10.1117/12.2657203
KEYWORDS: Semiconducting wafers, Critical dimension metrology, Sensors, Scanners, High volume manufacturing, Lithography, Optical lithography, Distributed interactive simulations, Device simulation, Process control

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top