Dr. Jeong-Heung Kong
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 11 April 2017 Presentation + Paper
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Manufacturing

Proceedings Article | 24 March 2017 Presentation + Paper
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Metrology, Sensors, Calibration, Scanners, Computer programming, Time metrology, Optical alignment, Semiconducting wafers, Wafer testing, Overlay metrology

Proceedings Article | 24 March 2017 Paper
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Reticles, Calibration, Scanners, Control systems, Distortion, Thermal effects, Optical alignment, Semiconducting wafers, HVAC controls, Overlay metrology, Temperature metrology

Proceedings Article | 24 March 2017 Presentation + Paper
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Metrology, Lithographic illumination, Data modeling, Calibration, Image processing, Scanners, Laser scanners, Process control, Finite element methods, Photomasks, Computational lithography, 3D scanning, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 15 March 2016 Paper
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Near infrared, Optical lithography, Opacity, Sensors, Image processing, Materials processing, Signal processing, Optical alignment, Optics manufacturing, Wafer testing, Overlay metrology

Showing 5 of 9 publications
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