Dr. Jeong Yun Yu
Vice President at Samsung SDI
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 27 March 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: System integration, Photoresist materials, Manufacturing, Bottom antireflective coatings, Silicon, Antireflective coatings, Materials processing, Photomasks, Etching, Resistance, Carbon, Reflectivity, Optical lithography, Chemical vapor deposition, Double patterning technology, Atomic layer deposition, Plasma

Proceedings Article | 4 March 2010
Proc. SPIE. 7640, Optical Microlithography XXIII
KEYWORDS: Reflectivity, Metals, Line width roughness, Logic devices, Multilayers, Etching, Lithography, Control systems, Immersion lithography, Back end of line

Proceedings Article | 10 April 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Reflectivity, Double patterning technology, Immersion lithography, Multilayers, Silicon, Interfaces, Optical lithography, Lithography, Etching, Control systems

Proceedings Article | 10 April 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Reflectivity, Metals, Multilayers, Etching, Line width roughness, Lithography, Control systems, Optical lithography, Logic devices, Tin

Proceedings Article | 15 April 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Metals, Lithography, Reflectivity, Optical lithography, Line width roughness, Immersion lithography, Reflection, Logic devices, Critical dimension metrology, Etching

Showing 5 of 6 publications
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