Dr. Jeong-yeol Jang
at Dongbu Electronics Co Ltd
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 11, 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Lithography, Optical lithography, Etching, Silicon, Resistance, Photoresist materials, Process control, Photomasks, Transistors, Line edge roughness

PROCEEDINGS ARTICLE | May 10, 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Lithography, Metrology, Etching, Scanning electron microscopy, Scatterometry, Process control, Critical dimension metrology, Semiconducting wafers, Scatter measurement, Diffraction gratings

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