Dr. Jeong-yeol Jang
at Dongbu Electronics Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 11 April 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Etching, Photoresist materials, Line edge roughness, Lithography, Transistors, Photomasks, Process control, Silicon, Resistance, Optical lithography

Proceedings Article | 10 May 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Critical dimension metrology, Scatterometry, Scanning electron microscopy, Semiconducting wafers, Process control, Etching, Metrology, Diffraction gratings, Scatter measurement, Lithography

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