Jeroen Willekens
MSC and Sales Representative at Deltapatents BV
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 21 March 2007
Proc. SPIE. 6521, Design for Manufacturability through Design-Process Integration
KEYWORDS: Silicon, Optical proximity correction, Design for manufacturing, Lithography, Manufacturing, Design for manufacturability, Process modeling, Photomasks, Computer simulations, Device simulation

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