Dr. Jérome Depre
Senior Application Support Engineer
SPIE Involvement:
Publications (11)

Proceedings Article | 27 April 2023 Poster + Paper
Proceedings Volume 12496, 1249633 (2023) https://doi.org/10.1117/12.2658296
KEYWORDS: Annealing, Semiconducting wafers, Metrology, Distortion, Overlay metrology, Deformation, Chemical mechanical planarization, Silicon, Optical interferometry, Manufacturing

Proceedings Article | 20 March 2020 Paper
Proceedings Volume 11325, 113251L (2020) https://doi.org/10.1117/12.2552012
KEYWORDS: Overlay metrology, Metrology, Scanners, Critical dimension metrology

Proceedings Article | 13 March 2018 Paper
Victor Calado, Jérôme Dépré, Clément Massacrier, Sergey Tarabrin, Richard van Haren, Florent Dettoni, Régis Bouyssou, Christophe Dezauzier
Proceedings Volume 10585, 1058507 (2018) https://doi.org/10.1117/12.2297673
KEYWORDS: Overlay metrology, Semiconducting wafers, Metrology, Diffraction, Diffraction gratings, Photons

Proceedings Article | 28 March 2017 Paper
Florent Dettoni, Régis Bouyssou, Christophe Dezauzier, Jerome Depre, Steffen Meyer, Christopher Prentice
Proceedings Volume 10145, 101452B (2017) https://doi.org/10.1117/12.2258206
KEYWORDS: Metrology, Overlay metrology, Scatterometry, Process control, Semiconductors, Lithography, Materials processing, Data processing, Target acquisition, Etching, Diffraction, Polarization, Commercial off the shelf technology, Scanning electron microscopy, Target detection, Time metrology

Proceedings Article | 19 March 2015 Paper
Henk-Jan Smilde, Richard J. van Haren, Willy van Buël, Lars H. Driessen, Jérôme Dépré, Jan Beltman, Florent Dettoni, Julien Ducoté, Christophe Dezauzier, Yoann Blancquaert
Proceedings Volume 9424, 942412 (2015) https://doi.org/10.1117/12.2085642
KEYWORDS: Metrology, Semiconducting wafers, Overlay metrology, Optical design, Scatterometry, Cameras, Wafer-level optics, Diffraction gratings, Sensors, Diffraction

Showing 5 of 11 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top