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Jerome Petit
at Commissariat à l'Energie Atomique
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Publications (4)
Proceedings Article | 10 May 2005 Paper
Improved CD and overlay metrology using an optical Fourier transform instrument
J. Petit, P. Boher, T. Leroux, P. Barritault, J. Hazart, P. Chaton
Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599464
KEYWORDS: Overlay metrology, Diffraction gratings, Diffraction, Fourier transforms, Reflectivity, Double patterning technology, Scattering, Fourier optics, Silicon, Spectroscopic ellipsometry
Proceedings Article | 10 May 2005 Paper
Optical Fourier transform scatterometry for LER and LWR metrology
P. Boher, J. Petit, T. Leroux, J. Foucher, Y. Desieres, J. Hazart, P. Chaton
Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.594526
KEYWORDS: Line width roughness, Line edge roughness, Dielectrophoresis, Diffraction, Diffraction gratings, Fourier optics, Critical dimension metrology, Fourier transforms, Scatterometry, Metrology
Proceedings Article | 24 May 2004 Paper
A new analysis strategy for CD metrology using rapid photo goniometry method
Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.533031
KEYWORDS: Diffraction gratings, Diffraction, Scanning electron microscopy, Critical dimension metrology, Spectroscopic ellipsometry, Polarizers, Specular reflections, Photoresist materials, CCD image sensors, Sensors
Proceedings Article | 24 May 2004 Paper
Innovative rapid photogoniometry method for CD metrology
Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.533426
KEYWORDS: Diffraction, Diffraction gratings, Fourier optics, Reflection, Polarization, Spectroscopic ellipsometry, CCD image sensors, Refractive index, Silicon, Sensors
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