Jerome Petit
at Commissariat à l'Energie Atomique
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 10 May 2005 Paper
J. Petit, P. Boher, T. Leroux, P. Barritault, J. Hazart, P. Chaton
Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599464
KEYWORDS: Overlay metrology, Diffraction gratings, Diffraction, Fourier transforms, Reflectivity, Double patterning technology, Scattering, Fourier optics, Silicon, Spectroscopic ellipsometry

Proceedings Article | 10 May 2005 Paper
P. Boher, J. Petit, T. Leroux, J. Foucher, Y. Desieres, J. Hazart, P. Chaton
Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.594526
KEYWORDS: Line width roughness, Line edge roughness, Dielectrophoresis, Diffraction, Diffraction gratings, Fourier optics, Critical dimension metrology, Fourier transforms, Scatterometry, Metrology

Proceedings Article | 24 May 2004 Paper
Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.533031
KEYWORDS: Diffraction gratings, Diffraction, Scanning electron microscopy, Critical dimension metrology, Spectroscopic ellipsometry, Polarizers, Specular reflections, Photoresist materials, CCD image sensors, Sensors

Proceedings Article | 24 May 2004 Paper
Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.533426
KEYWORDS: Diffraction, Diffraction gratings, Fourier optics, Reflection, Polarization, Spectroscopic ellipsometry, CCD image sensors, Refractive index, Silicon, Sensors

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