Jerry L. Leonard
Senior Process Engineer at DigitalOptics Corp
SPIE Involvement:
Author
Publications (8)

PROCEEDINGS ARTICLE | August 16, 2010
Proc. SPIE. 7789, Laser Beam Shaping XI
KEYWORDS: Optical lithography, Diffractive optical elements, Silica, Etching, Reflectivity, Photoresist materials, Thin film coatings, Photoresist processing, Semiconducting wafers, Binary data

PROCEEDINGS ARTICLE | March 7, 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Semiconductors, Lithography, Lithographic illumination, Custom fabrication, Diffractive optical elements, Etching, Diffusers, Photomasks, Critical dimension metrology, Optics manufacturing

PROCEEDINGS ARTICLE | January 17, 2003
Proc. SPIE. 4984, Micromachining Technology for Micro-Optics and Nano-Optics
KEYWORDS: Lithography, Optical lithography, Lithographic illumination, Calcium, Photoresist materials, Diffusers, Photomasks, Computer aided design, Binary data, Resolution enhancement technologies

PROCEEDINGS ARTICLE | July 30, 2002
Proc. SPIE. 4691, Optical Microlithography XV
KEYWORDS: Lithography, Holograms, Lithographic illumination, Calcium, Scanning electron microscopy, Photoresist materials, Diffusers, Photomasks, Computer aided design, Binary data

PROCEEDINGS ARTICLE | June 16, 1995
Proc. SPIE. 2489, Transition of Optical Processors into Systems 1995
KEYWORDS: Switches, Mach-Zehnder interferometers, Waveguides, Cladding, Etching, Aluminum, Optical switching, Phased array optics, Polysomnography, Phase shifts

PROCEEDINGS ARTICLE | June 17, 1994
Proc. SPIE. 2236, Transition of Optical Processing into Systems 1994
KEYWORDS: Switches, Mach-Zehnder interferometers, Waveguides, Interferometers, Cladding, Etching, Metals, 3D modeling, Aluminum, Polysomnography

Showing 5 of 8 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top