Dr. Jerwei Hsieh Profile

Dr. Jerwei Hsieh

Research Scientist at National Tsing Hua Univ

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Publications (3)

Proceedings Article | 28 September 2001 Paper

Toward the micromachined vibrating gyroscope using (111) silicon wafer process

Jerwei Hsieh, Wen-Chih Chen, Weileun Fang

Proceedings Volume 4557, (2001) https://doi.org/10.1117/12.442961

KEYWORDS: Silicon, Semiconducting wafers, Etching, Gyroscopes, Boron, Diffusion, Fabrication, Reactive ion etching, Capacitance, Electrodes

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Proceedings Article | 8 September 1998 Paper

Fabrication of micro torsional actuator using surface plus bulk micromachining processes

Jerwei Hsieh, Weileun Fang

Proceedings Volume 3514, (1998) https://doi.org/10.1117/12.323910

KEYWORDS: Mirrors, Electrodes, Actuators, Bulk micromachining, Plasma enhanced chemical vapor deposition, Thin films, Oxides, Surface micromachining, Amorphous silicon, Etching

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Proceedings Article | 23 October 1992 Paper

Studies on surface passivation of GaAs by P2S5/(NH4)2S and (NH4)2Sx sulfurization techniques

Jerwei Hsieh, Huey Liang Hwang

Proceedings Volume 1813, (1992) https://doi.org/10.1117/12.131257

KEYWORDS: Gallium arsenide, Arsenic, Oxides, Gallium, Chemical species, Diodes, Sulfur, Gold, Aluminum, Phonons

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