Mr. Jhen-Cyuan Li Profile

Jhen-Cyuan Li

at Shanghai Huali Integrated Circuit Corp.

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Publications (1)

Proceedings Article | 20 March 2020

The improvement of measurement accuracy of SADP pitch walking issue

Pei Liu, Cheng-Zhang Wu, Hung-Wen Chao, Wenzhan Zhou, Yu Zhang, Chan-Yuan Hu, Yujie Xu, Jhen-Cyuan Li, Yen-Chan Qiu, Chun-Han Liu, Ran-Fu Yang, Chi-Hung Wang

Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV

KEYWORDS: Deep ultraviolet, Fin field effect transistors, Electro optical systems calibration, Calibration, Etching, Electron microscopes, Scanning electron microscopy, Transmission electron microscopy, Image quality, Precision measurement, Image filtering, Integrated circuits, Semiconducting wafers, 193nm lithography, Accuracy assessment

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