Prof. Ji Won Kim
at Hanyang Univ
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 14 March 2018
Proc. SPIE. 10511, Solid State Lasers XXVII: Technology and Devices
KEYWORDS: Second-harmonic generation, Femtosecond phenomena, Laser therapeutics, Laser vision correction, High power lasers, Crystals, Ytterbium, Laser crystals, Harmonic generation, Nonlinear crystals

Proceedings Article | 18 March 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Carbon, Lithography, Contamination, Silicon, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Critical dimension metrology, Absorption

Proceedings Article | 1 April 2013
Proc. SPIE. 8679, Extreme Ultraviolet (EUV) Lithography IV
KEYWORDS: Lithography, Nickel, Silicon, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, High volume manufacturing, Zirconium, Temperature metrology

Proceedings Article | 23 March 2012
Proc. SPIE. 8322, Extreme Ultraviolet (EUV) Lithography III
KEYWORDS: Thin films, Lithography, Contamination, Silicon, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Thermal modeling, Absorption

Proceedings Article | 23 March 2012
Proc. SPIE. 8322, Extreme Ultraviolet (EUV) Lithography III
KEYWORDS: Thin films, Lithography, Data modeling, Silicon, Distortion, Computer simulations, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography

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