Ms. Ji-Hyun Lee Profile

Ji-Hyun Lee

at SAMSUNG Electronics Co Ltd

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 11 May 2009

Ji-Hyun Lee, Il-Yong Jang, Yu Suk Jeong, Byounghoon Seung, Seong-Yong Moon, Sang-Gyun Woo, Han Ku Cho

Proc. SPIE. 7379, Photomask and Next-Generation Lithography Mask Technology XVI

KEYWORDS: Etching, Chromium, Plasma, Fluorine, Particles, Chlorine, Dielectrics, Plasma etching, Photomasks, Aluminum

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Keywords/Phrases