Ji Li
at Synopsys Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 10 March 2010
Proc. SPIE. 7640, Optical Microlithography XXIII
KEYWORDS: Atrial fibrillation, Manufacturing, 3D modeling, Printing, Solids, Photomasks, Cadmium sulfide, Optical proximity correction, Critical dimension metrology, Model-based design

Proceedings Article | 17 October 2008
Proc. SPIE. 7122, Photomask Technology 2008
KEYWORDS: Semiconductors, Lithography, Optical lithography, Atrial fibrillation, Lithographic illumination, Manufacturing, Optical proximity correction, Semiconducting wafers, Process modeling, Resolution enhancement technologies

Proceedings Article | 4 March 2008
Proc. SPIE. 6925, Design for Manufacturability through Design-Process Integration II
KEYWORDS: Lithography, Atrial fibrillation, Diffractive optical elements, Error analysis, Head, Bridges, Optical proximity correction, Critical dimension metrology, Process modeling, Resolution enhancement technologies

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