Prof. Jia-Han Li
at National Taiwan Univ
SPIE Involvement:
Author
Publications (12)

Proceedings Article | 28 March 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Lithography, Electron beam lithography, Metrology, Optical lithography, Inspection, Ion beams, Bridges, Helium, Critical dimension metrology, Photoresist processing

Proceedings Article | 2 April 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Lithography, Diffraction, Scattering, Calibration, Light scattering, 3D modeling, Scatterometry, Process control, Photoresist processing, Semiconducting wafers

SPIE Journal Paper | 6 December 2013
JM3 Vol. 12 Issue 04
KEYWORDS: Silicon, Reflectivity, Molybdenum, Mirrors, Absorption, Extreme ultraviolet, Photonic crystals, Chromium, Lithium, Extreme ultraviolet lithography

Proceedings Article | 18 April 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Lithography, Data modeling, Calibration, Scatterometry, Signal processing, Process control, Photomasks, Optical proximity correction, Systems modeling, Process modeling

Proceedings Article | 5 April 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Point spread functions, Metrology, Cadmium, Scattering, Calibration, Scanning electron microscopy, Scatterometry, Line edge roughness, Semiconducting wafers, Process modeling

Showing 5 of 12 publications
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