Jia-Syun Cai
at National Taiwan Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 20 March 2019
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Transistors, Extreme ultraviolet lithography, TCAD, Device simulation

Proceedings Article | 20 March 2019
Proc. SPIE. 10961, Optical Microlithography XXXII
KEYWORDS: Lithography, Photomasks, Machine learning, Computational lithography, Optical proximity correction

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