Dr. Jia Zeng
at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Logic, Switching, Metals, Reliability, Resistance, Power supplies, Capacitance, Design for manufacturing, Transistors, Integrated circuit design, Electronic design automation, Inductance

PROCEEDINGS ARTICLE | March 16, 2016
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Lithography, Metals, Manufacturing, Design for manufacturing, Photomasks, Image classification, Double patterning technology, Optical proximity correction, Overlay metrology, 193nm lithography, Library classification systems, Design for manufacturability

PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Lithography, Electron beam lithography, Logic, Optical lithography, Metals, Photomasks, Extreme ultraviolet, Double patterning technology, Optical proximity correction, EUV optics

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