Dr. Jiahui Fu
PhD student at Harbin Institute of Technology
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 24, 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Microelectromechanical systems, Waveguides, Metals, Dielectrics, Silicon, Integrated circuits, Micromachining, Computer aided design, Microwave radiation, Integrated circuit design

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