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Jian-Lin Chen
at Taiwan Instrument Research Institute
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Publications (1)
Proceedings Article | 2 March 2020 Paper
An electric measuring equipment integrated with an automatic optical registration and a chamber-based gas supply system for wafer-based gas sensors
Ming-Fu Chen, Yi-Hao Lin, Chih-Wen Chen, Po-Jui Chen, Yu-Hsin Lin, Wen-Hao Cho, Jian-Lin Chen
Proceedings Volume 11287, 112871E (2020) https://doi.org/10.1117/12.2545503
KEYWORDS: Semiconducting wafers, Gas sensors, Image registration, Imaging devices, Optical imaging, Integrated optics
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