We report for the first time the use of orientation dependent etching (ODE) of (110) c-Si in sidewall thin film technology for imprint mask fabrication with low line edge roughness (LER) over a large area. Oxidation is used for sidewall thin film formation with a good critical dimension control. 2-dimensional oxidation effects are discussed. Features down to 12 nm have been fabricated successfully. Simulation shows that the fabricated oxide line is strong enough to imprint both thermoplastic and photo-curable imprint resists.
We report our fabrication of nanoscale devices using electron beam and nanoimprint lithography (NIL). We focus our study in the emerging fields of NIL, nanophotonics and nanobiotechnology and give a few examples as to how these nanodevices may be applied toward genomic and proteomic applications for molecular analysis. The examples include reverse NIL-fabricated nanofluidic channels for DNA stretching, nanoscale molecular traps constructed from dielectric constrictions for DNA or protein focusing by dielectrophoresis, multi-layer nanoburger and nanoburger multiplets for optimized surface-plasma enhanced Raman scattering for protein detection, and biomolecular motor-based nanosystems. The development of advanced nanopatterning techniques promises reliable and high-throughput manufacturing of nanodevices which could impact significantly on the areas of genomics, proteomics, drug discovery and molecular clinical diagnostics.
Nano optical biosensors employ the interaction between biomolecules and light confined in nanometer scale structures to report the bio-recognition events. This small scale sensing area/volume can ensure that small amount of biorecognition events could be detected. The exceptional sensitivity and high spatial density of nano optical biosensors make them unique in practical applications in nucleic acid detection. Lab-on-a-Chip systems provide the capabilities of separation, cell lysing, polymerase chain reaction (PCR), allowing finishing bio agent detection processes on a chip. In this paper, we present our recent efforts on integrating some novel nanooptical biosensors into Lab-on-a-Chip systems and some preliminary test results.