Mr. Jian He Profile

Jian He

at GeSiM Gesellschaft fuer Silizium-Mikrosysteme mbH

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Publications (2)

Proceedings Article | 21 March 2012 Paper

Deformations of soft imprint templates in the nanoimprint lithography

Jian He, S. Howitz, S. Killge, K. Richter, J. Bartha

Proceedings Volume 8323, 83231B (2012) https://doi.org/10.1117/12.916287

KEYWORDS: Nanoimprint lithography, Finite element methods, CMOS technology, Electroluminescence, Polymers, Silicon, Surface conduction electron emitter displays, Neodymium, Ultraviolet radiation, Semiconductors

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Proceedings Article | 17 March 2012 Paper

Pattern transfer from the e-beam resist, over the nanoimprint resist and to the final silicon substrate

Jian He, S. Howitz, K. Richter, J. Bartha, J. Moench

Proceedings Volume 8328, 83280S (2012) https://doi.org/10.1117/12.916285

KEYWORDS: Silicon, Etching, Nanoimprint lithography, Reactive ion etching, Chemical species, Protactinium, Polymers, Photoresist processing, Nanolithography, Plasma etching

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