Dr. Jian Mi
Assistant Technical Director at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 13, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Image visualization, Metrology, Image compression, Visualization, Inspection, Scanning electron microscopy, Optical inspection, Image enhancement, Double patterning technology, Semiconducting wafers

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