Dr. Jian Mi
Assistant Technical Director
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 20 March 2019
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Metrology, Metals, Image processing, Atomic force microscopy, Data processing, 3D metrology, Semiconducting wafers, Wafer bonding, 3D image processing, Chemical mechanical planarization

Proceedings Article | 13 March 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Image visualization, Metrology, Image compression, Visualization, Inspection, Scanning electron microscopy, Optical inspection, Image enhancement, Double patterning technology, Semiconducting wafers

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