Jian Rao
at Mentor Graphics Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 16 March 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Calibration, Databases, Scanning electron microscopy, Image enhancement, Optical proximity correction, SRAF, Convolution, Analytical research, Process modeling, Resolution enhancement technologies

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