In this work, a nanoscale surface-enhanced Raman scattering (SERS) substrate is fabricated by fs laser reduction and
deposition. The conductive silver microstructures are also deposited in fs laser irradiated area on the glass surfaces.
Based on this approach, we integrate the microelectronic circuit and micro-Raman substrate into a microfluidic chamber
and form a prototype of Raman biochip for biosensing. Enhancement of Raman signal and control of temperature of the
sensor are both achieved. This technique provides a great potential for integrating microelectronics and micro-Raman
sensors on a single glass chip.
In this paper, selective deposition of conductive copper films on glass surfaces is demonstrated with the assistance of
femtosecond laser surface modification followed by electroless plating. Irradiation of femtosecond laser makes it
possible to selectively deposit copper films in the irradiated area on glass surfaces coated with silver nitrate films. The
influence of the laser direct writing parameters and the electroless plating process on the formation of copper films is
discussed. Meanwhile, the electric properties of copper films are investigated, which confirms that copper films are
conductive. A tentative mechanism of the selective deposition process is also proposed. In addition, the potential
application of this technique for integrating electrical and thermal functions into microdevices is discussed.