Jian Zhang
at KLA China
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 March 2020 Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Metrology, Data modeling, 3D modeling, Machine learning, Semiconducting wafers, Performance modeling, Overlay metrology

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